X-ray mask copying system using X-ray beam lithography - uses telescope and capacitive spacing sensor for accurate alignment and spacing of mask holders and heat sink

摘要

The X-ray mask copying system uses two mask holders (1..3; 4..6) and a heat sink (12) for the obtained mask copy, with accurate alignment and spacing of the master mask and the copy via a sliding, autocollimation telescope (18). The exact spacing of the heat sink and the copy is provided by at least one capacitive spacing sensor (13). Pref. each mask holder has a metal holding plate (3, 6), an attached carrier plate (2, 5) and a reception device (1, 4) for the carrier plate, allowing adjustment of the latter via coordinate setting screws (11). ADVANTAGE - Increased alignment and spacing precision of lithography components.