Thin film photovoltaic converter mfr. for mass production of solar cells - has flexible carrier guided into airtight coating chambers having sealing mechanism which adheres to carrier at inlet and outlet

摘要

The method involves guiding the flexible carrier (1) into different coating chambers (31, 32, 33) arranged in a line. Layers are formed in a predetermined vacuum atmosphere on the carrier which is held stationary. The coating chambers are kept airtight by walls (8) which have a sealing mechanism on the inlet and outlet for the carrier. The sealing mechanism adheres to the carrier. After the coating process the carrier is separated from the coating chamber walls and is transported to the next coating position. ADVANTAGE - Each layer is formed under optimum pressure without damaging flexible carrier. Gives great freedom in determining speed of forming each layer.