PROCEDURE AND PREPARATION FOR THE CONTACT MEASUREMENT OF ELECTRICAL SPANGES IN A MEASUREMENT OBJECT WITH AN ISOLATOR AREA.

摘要

PCT No. PCT/DE92/00014 Sec. 371 Date Aug. 3, 1993 Sec. 102(e) Date Aug. 3, 1993 PCT Filed Jan. 10, 1992 PCT Pub. No. WO92/14162 PCT Pub. Date Aug. 20, 1992.A method and device for contactless measurement of electric voltages in a unit under measurement with an insulating surface, a primary electron beam being directed onto the insulating surface of the unit. The energy of the secondary electrons in a secondary electron flow generated at the insulating surface of the unit is measured and the potential of a conducting zone located below the insulating surface of the unit is derived from this measurement. In order to increase the measurement precision, an electric alternating absorption field is generated above the unit under measurement and the measurement of the energy of the secondary electrons is carried out in synchronism with the alternating field.