Method of protection of the surfaces against the ambient particulate contamination with the aid of the blower elements.

摘要

The blowing ramp thus constituted by the blower elements makes it possible to maintain an ultra-clean atmosphere in the plane surfaces of objects during their transport, while using a low flow rate of air. & br / the blower elements are mainly constituted by a plate 2 having a central orifice 6. Facing that - latter is mounted a pipe 4 is supplied in the ultra-clean air. & br / the process consists in placing the surface (11) of the objects (10) at a distance (d) of the order of a millimeter of the blowing surface (7). The flow of air between these two surfaces is easily adjusted in order to be laminar, so as to ensure the protection against a particulate contamination. & br / application to the transport of the silicon wafers.