Gas purging appts. for container to transport semiconductor components - comprises housing with gas inlet and outlet, container cover and locking mechanism to replace oxygen in container with nitrogen@, and gas inlet and outlet connected to gas supply

摘要

The appts. comprises a housing (40) with an aperture (42) and a surrounding support (43) for the container (10) with a cover (20) and locking mechanism. The appts. has a gas inlet (44A) and an outlet (44B), with the inlet connected to a gas supply (50) and both the inlet and outlet connected to the hosuing (40). It also has a lifting unit (48) to close the aperture (42) from inside the housing and control the operation of the locking mechanisms. The gas inlet and outlet are linked to the edges o the aperture (42), and when the gas is purged from the container the cover (20) is unlocked and lowered slowly at the same time as the locking mechanis, so the interior of the housing is in communication with the inside of the container. ADVANTAGE - Appts. replaces oxygen in container with nitrogen as semiconductor plates are transported between mfg. operations.