Microwave excited plasma reactor - uses cylindrical quartz-walled plasma deposition chamber with conducting exterior having windows for waveguide connections from generator

摘要

The plasma reactor supplies (5,6) gas, such as argon or hydrogen, centrally to a sealed chamber, typically 400mm high, 150mm dia., having a 10mm thick quartz wall (2), metallised or copper-sheeted externally (7). A rectangular waveguide (4) connects the 600W 2.45GHz generator (3) to a window (8) in the conducting exterior, at cylinder mid-height, dimensioned to match the waveguide end (9) and complete the conducting enclosure. Propagation occurs in the quartz dielectric, in the same mode as in the guide, with plasma in contact with the interior surface. To ensure the whole interior is plasma-filled, sections of the interior wall may be metallised and/or additional peripheral excitation points may be provided. The substrate to be treated is supported inside. USE/ADVANTAGE - For plasma deposition on ceramic substrate. Interior is unencumbered by e.g. antennae, maximising useful volume.