Method for divisional measurement of object surface, and method for joining object surface sub-areas measured by same

摘要

Each sub-area of an object surface is measured with a partial overlapping on the peripheral edges of at least adjacent sub-areas. Surface state data of each sub-area is acquired and calculated to produce a reconstructed image. The images of the reconstructed sub-areas are made to partially overlap, and differences between the reconstructed images at selected points within the overlapped region are determined. A predetermined calculation is performed to determine coefficients, for altering the relative alignment of the reconstructed images, which minimize the differences. The reconstructed images are contiguously joined together by application of the coefficients. Thus, boundaries between the reconstructed images are joined contiguously into an accurate form.