SOFT X-RAY MICROSCOPE AND ALIGNMENT ADJUSTING METHOD

摘要

PURPOSE: To improve operability by matching the illumination position and observation position of a visible light observation system and a soft X-ray observation system in a soft X-ray microscope with built-in visible light observation system. ;CONSTITUTION: This microscope is provided with a driving means for independently adjusting the objective lens of a visible light observation system from the outside of a vacuum container 119 to match the observation position of a soft X-ray observation system and the visible light observation system, for example. The drive is made via flexible shafts 10 and rotation introducers 11. A visible light objective lens can be driven from the outside of the vacuum container 119, thus the visible light objective lens can be adjusted from the outside of the vacuum container 119 while the image of an observation object by soft X-rays and the image of the observation object by the visible light are compared. The alignment adjustment between the soft X-ray objective lens and the visible light objective lens can be easily made. A soft X-ray capacitor or a visible light capacitor is driven from the outside of the vacuum container 119 to match the illumination position.;COPYRIGHT: (C)1995,JPO