Electro- migration life measurement modulo of the wiring layer and the device null which is used for

摘要

PURPOSE:To allow error-free measurement by supplying a DC current in one direction to one of the same two wiring layers and the DC current alternately iterating in forward and backward directions in the other thereof respectively until the wiring layers are disconnected and determining TE=T1.T2/(T2-T1) from both time T1, T2 thereof. CONSTITUTION:The same two wiring layers 11, 12 to be measured are prepd. The resistance value between connecting terminals P1 and P2 changed at the point t0 of energization start time and the point ts of disconnection start time when the wiring layer 11 is first connected between the terminals P1 and P2 and when the DC current is supplied in one direction from the power source 2 until the wiring layer is discon nected. The measurement output S1 indicating this change is, therefore, obtd. by the measuring instrument 3 and the time T1 between the points t0 and ts of time is obtd. by a time measuring instrument 4. The wiring 12 is then changed to 11 and the DC current alternately iterating in forward and backward directions is supplied thereto until the wiring is disconnected. The time T2 is similarly obtd. The TE=T1.T2/(T2-T1) is determined therefrom and the measurement output E is obtd. The measurement which does not include the errors by the thermal migration effect is executed in this way.