Infrared radiation thermometry manner and three-dimensional sensitivity distribution measuring method for that, measuring equipment and thermomigration factor measuring method

摘要

PURPOSE:To make measurement with high resolution by first measuring the space sensitivity distribution characteristic to an IR detecting system and correcting the actually measured temp. distribution of an object surface by using this distribution at the time of measuring the surface temp. of an object having a temp. distribution by using the detecting system without contact. CONSTITUTION:A slit 34 is first inserted into an optical path in order to form a slender wire-shaped laser beam 32 at the tie of using, for example, a slender thin film-like sample 30 as an object and measuring this surface temp. distribution. The width of the sample 30 is set shorter than the longitudinal size of the beam 32 in order to attain a one-dimensional heat conduction state and further, carbon powder of the extent of not giving influence to the temp. distribution is previously applied on the rear surface of the sample 30 in order to increase the SN at the time of setting a temp. response curve. The temp. of the sample 30 is thereafter changed by using liquid nitrogen and the laser is focused to the prescribed position of the sample by a silicon lens 14. This position is detected by an InSb IR detector 16. The detector 16 is moved to change its position at this time by which the desired temp. distribution is obtd.