REFLECTION LIGHT MEASUREMENT METHOD IN MICROSCOPIC PHOTOMETER

摘要

PURPOSE: To provide a reflection light measurement method in a microscopic photometer which can measure reflection light accurately by eliminating stray light. ;CONSTITUTION: A sample stand 13 placed on a sample 4 to be measured is moved to the focusing position of a reflection objective lens 2. In this state, a first reflection light is measured. Then, the sample stand 13 where the sample 4 to be measured is placed is moved to the non-focusing position of the reflection objective lens 2. In this state, second reflection light which is stray light is measured. From the above measurement value, the actual reflection light of the sample 4 to be measured is obtained by subtracting the second reflection light from the first reflection light.;COPYRIGHT: (C)1995,JPO