ANALYSIS METHOD FOR METALLIC IMPURITY ELEMENT IN HIGH PURITY METALLIC MATERIAL AND DEVICE THEREFOR

摘要

PURPOSE: To quickly perform a highly precise analysis with simple operation by feeding acidic water solution containing a dissolved high purity metallic material to a constant flowrate eluate flow passage having an elimination column. ;CONSTITUTION: A selector valve 4 initially has a flow passage connected with a solid line, and a feed pump 2 is under operation. Also, eluate in a reservoir 1 is made to flow to a discharge port 9 via the port 4a of the valve 4, an elimination column 7 filled with negative ion exchange resin, and an induction coupled plasma mass spectrograph 8. Furthermore, a sample liquid in a measuring flask 6 is introduced, for example, to a sample liquid filling loop 3 of 100μl capacity via ports 4d and 4c via suction with a syringe 5. The sample liquid after supplied is carried to the column 7 on the eluate fed with the pump 2 via the selection of the valve 4 at a flow passage shown with a broken line. In the column 7, a metallic main component element in the sample liquid is adsorbed and removed, and a coexisting metallic impurity element is introduced to an analyzer 8, thereby being separated and detected. The acidic water solution is made to flow to the column 7 and the metallic main component element is eluted.;COPYRIGHT: (C)1995,JPO