Suction-type ozone gas detector

摘要

An ozone gas sensor comprising a film type semiconductor element including a substrate (18a) and a semiconductor film (18b) consisting of a metallic oxide formed on the substrate, and a layer of silica (21) formed on a surface of the film type semiconductor element. At least one thin film layer of one or a plurality of types selected from metals and metal oxides is interposed between the semiconductor film and the layer of silica.