Extremely sheet condition body transfer device

摘要

PURPOSE:To shift a ultra-thin plate-shaped body in no contact in a liquid by separting ultra-thin plate-shaped bodies one by one via the injection of the liquid from the second liquid injection port, and carrying the uppermost ultra- thin plate-shaped body among the separated ultra-thin plate-shaped bodies to the outside of a storing container through a notch section via the injection of the liquid from the third liquid injection port. CONSTITUTION:Several ultra-thin plate-shaped bodies 3 from above among stacked ultra-thin plate-shaped bodies are floated via the suction of a liquid from a liquid suction port 14 and the injection of the liquid from the first liquid injection port 17. The floated several ultra-thin plate-shaped bodies 3 are separated one by one via the injection of the liquid from the second liquid injection port 22. The uppermost ultra-thin plate-shaped body 3 among the separated ultra-thin plate-shaped bodies 3 flows to the outside of a storing container 2 through a notch section 21 via the injection of the liquid from the third liquid injection port 24.