NEEDLESS FILM REMOVING DEVICE OF COATED SUBSTRATE FORMED BY SPIN-COATING STEP

摘要

PURPOSE: To provide an automatically removing device of thick film parts on the peripheries of spin-coated substrates without affecting the quality of the substrates themselves. ;CONSTITUTION: This removing device of thick film parts on the peripheries of spin- coated substrates is composed of at least a substrate holding part 3 holding the substrate 2 to be processed, an XYZ driving part 9 driving the substrate holding part 3, a carrier part 5 carrying the substrate holding part 3 and the XYZ driving part 9, removing jigs 4 removing any needless films as well as a control part controlling the substrate holding part 3, the XYZ driving part 9, the carrier part 5 and the removing jigs 4 by relating said parts 3, 9, 5 and 4 with one another using a position sensor, etc. In such a constitution, the removing jigs 4 covering the parts of the peripheries of the substrate 2 to be processed and shifting along the sides of the coated substrates by the driving part 9 while being position-controlled by a position sensor are to be composed of the head part thereof for removing needless films, a solvent feed piping part piping a solvent through the intermediary of a dry pump, a vacuum exhaust part (pressure reduced line part) and a trap of molten solvent in the removed needless films.;COPYRIGHT: (C)1995,JPO