STRAIN MEASURING DEVICE, STRAIN CONTROLLER, GRASPING FORCE MEASURING DEVICE AND MACHINING CONTROLLER

摘要

PURPOSE: To make sensitivity linear, improve measurement sensitivity, measurement precision and reliability, reduce device manufacture cost and enlarge an object to be measured. ;CONSTITUTION: Constitution is performed in that a light source 3. a polarizing beam splitter 5 for converting light 4 emitted from the light source into linear polarization 6, a transparent solid 2 formed on the surface of a member 1 on which strain is caused, a light intensity detector 8 for passing the transparent solid 2 and detecting signal light 10 through the polarizing beam splitter 5, a convertor 11 for converting output of the light intensity detector 8 into strain and a wave length plate 13 placed in a light path 13. Because a phase of linear polarization or reflection light 9 which is made incident on the transparent solid 2 is converted by means of the wave length plate 13, relation between the strain and signal light intensity is clanged over from non-linearity to pseudolinearity.;COPYRIGHT: (C)1995,JPO