ELECTRODE FOR X-RAY DISCHARGE EXCITED GAS LASER AND GAS LASER DEVICE

摘要

PURPOSE: To provide a small-sized, low-powered, and low-cost X-ray discharge exciting gas laser capable of making an X-ray amount to be generated by an X-ray generator into a few fraction with high safety. ;CONSTITUTION: Figure is a structural view of a rear emitting X-ray preliminary ionixation discharge excited gas laser, X-rays generated by an X-ray generator 4 pass through a discharge electrode 3 used also as an X-ray opening for a dischrage excitation to ionize laser gas in a discharge space. The discharge electrode 3 used also as the X-ray opening is made by coating matter having a lower atomic number and excellent permeability of X-rays with a metallic layer, and its transmissivity of X-rays becomes severalfold as compared with a conventional metal electrode and even especial low energy X-rays can effectively be transmitted. Accordingly, it is possible to perform low voltage operations of an X-ray pipe.;COPYRIGHT: (C)1994,JPO