LAMINATED FILM TYPE SOLID STATE IMAGE PICKUP DEVICE FOR X-RAY DETECTION

摘要

PURPOSE: To improve the sensitivity of soft X-ray detection by forming a surface electrode of a laminated film type solid state image pickup device for X-ray detection with a metal film of any of molybdenum, rhodium, silver, gold and platinum. ;CONSTITUTION: A surface electrode 21 of laminated film type solid state image pickup device for X-ray detection is formed with a metal film 11 of any of the molybdenum, the rhodium, the silver, the gold and the platinum. In the soft X-ray range of 50Å to 150Å, the molybdenum, the rhodium and the silver have longer absorption edges than that of the aluminum and, at the same film thickness, have lower absorption rate of incident rays 11 by the film. Absorption edges of the gold and the silver are a little longer than that of the aluminum but conduction rates of them are much higher than that of the aluminum, and as the film thickness of it is formed thinner, the absorption rates of the soft X-ray 11 of it are lower than that of the aluminum. Therefore the sensitivity of the soft X-ray detection is improved.;COPYRIGHT: (C)1995,JPO