PEAK DETECTION METHOD BY MEANS OF LIGHT-SELECTING METHOD

摘要

PURPOSE: To provide a peak detection method, by means of a light-sectioning method, which can precisely detect the position of a substrate to be used as a height-measuring reference and, as a result, which can enhance the accuracy of a height-measuring operation when the height of a formation object in a printed-circuit board, a semiconductor integrated circuit or the like is measured by using the light-sectioning method. ;CONSTITUTION: In a peak detection method, the position of a pixel whose brightness reaches a peak is detected on the basis of an image which has picked up image of a cutting line by using a light-sectioning method, and the height of an object to be measured is measured. In the peak detection method, the brightness of the detected image is compared with a preset reference brightness which is a little lower than the brightness of the image of a substrate, values which are lower than the reference brightness are deleted, a light-sectioning image is formed newly on the basis of a remaining numerical value, and the position of the substrate is detected on the basis of the image.;COPYRIGHT: (C)1995,JPO