A set of film driven mirrors for an optional player system and manufacturing method.

摘要

A set of mxn mirrors driven by thin films for optical projection is described, which includes an active matrix, an elastic mxn array, a set of mxn pair arrays with driving structure, a mirror array and a set of mirrors from the support. Each elastic member has a farthest and closest part, including the closest part, the slashes of the first and second parts, the diagonal lines of the first and second parts separated, and the indentations determined between the two parts.Including the farthest exit. Stretch out from each elastic member, and then one elastic member in the colon. Each driving structure is located on the first and second tubes of each elastic member, and each driving structure includes a pin electrode,A signal electrode and a moving inductor layer Each mirror is formed on top of the elastic member. This is used by each supporting member to support each elastic member. When the two driving structures are deformed due to electric signals, the parts of the first and the second steel pipes of the elastic members with the driving structure change indefinitely, while the parts of the other elastic members change indefinitely, so the mirror formed is at the top,Keep it flat so that the entire mirror reflects the light. Figure 1 illustrates a transverse view of a group of driven thin film mirrors.