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process for the realization of metrological structures particularly for the direct measurement of errors introduced by systems of alignment.
process for the realization of metrological structures particularly for the direct measurement of errors introduced by systems of alignment.
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机译:用于实现计量结构的过程,特别是用于直接测量对准系统引入的误差的过程。
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摘要
process for the realization of metrological structures particularly for the direct measurement of errors introduced by alignment systems whose peculiarity is the establishment coveredporanea on a same substrate alignment marks metrological and signs of alignment plates processed according to predetermined sizes.
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