DIAMOND FILM GROWTH FROM FULLERENE PRECURSORS

摘要

A method and system for manufacturing diamond film. The method involves forming a fullerene vapor (26), providing a noble gas stream (20), and combining the gas with the fullerene vapor (18), passing the combined fullerene vapor and noble gas carrier stream into a chamber (16) forming a plasma (25) in the chamber causing fragmentation of the fullerene and deposition of a diamond film on a substrate (24).