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Laser deposition of crystalline boron nitride films
Laser deposition of crystalline boron nitride films
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机译:晶体氮化硼薄膜的激光沉积
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摘要
Thin films of boron nitride are grown on single crystal silicon substrates using laser deposition techniques. The films are characterized by essentially a single crystal structure throughout and in having a cubic structure which is in epitaxial registry with the underlying silicon substrate.
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