METHOD OF PREPARING A IN-SU OXIDE SINTERING AND DEVICE FOR PRESSURE FORMING FILTER OBJECT

摘要

The manufacturing method for ITO target improves productivity by preventing the mixture of impure materials. The manufacturing method comprises (A) obtaining slurry with ITO powders and water using a crusher; (B) forming the slurry by applying pressure filtration and cold isostatic pressing the formed body; (C) sintering at 1300-1700C.