Fabrication method of high temperature superconducting bandpass filter for microwave

摘要

The present invention relates to a passive element for information communication using a high-temperature superconductor, which is quite different from a currently used material, and more particularly, to a method of manufacturing a microwave bandpass filter having an excellent performance in a high frequency range.;A high-temperature superconducting epitaxial thin film was prepared and photolithographic process using an electron beam mask transferring the optimal circuit pattern obtained by simulation and mixed ing process were used to fabricate YBa₂Cu₃O_7-8/ Mg0 / Cr / Cu / Au structure is fabricated.;The microwave device manufactured according to the present invention has high possibility of application of high temperature superconductor through measurement of high frequency property and shows superior performance to conventional metal thin film type high frequency passive device at low temperature (about 77K).;From the fabrication of high-temperature superconducting thin films to the fabrication of a band-pass filter, complex and various device manufacturing processes are performed. However, the precision and sharpness of the circuit pattern to be formed on the substrate can be improved through these processes.