High-temperature superconducting closed-loop resonator type 4-pole bandpass filter for microwave and manufacturing method thereof

摘要

The present invention relates to a high-temperature superconducting 4-pole band-pass filter for microwave and a method of manufacturing the same. More particularly, the present invention relates to a high-temperature superconducting 4-pole band-In order to avoid induction of deterioration of superconductivity, a metal pad is deposited on the input / output stage so as not to affect the characteristic of the low temperature microwave, and the etching method which focuses on the dry etching rather than the wet etching. A superconducting band-pass filter and a method of manufacturing the same, and has an effective signal transmission blocking function and a noise canceling function because the signal passes through almost without loss and skirt characteristics are good in the stop band at both ends of the pass band.