METHOD OF SYNTHESIS OF BIS-(TRIMETHYLSILYL) -AMINOTRIALKOXYGERMANIUM

摘要

FIELD: organometallic chemistry. SUBSTANCE: product - bis-(trimethylsilyl)- aminotrialkoxygermanium of the formula (R)₃GeN[Si(CH₃)₃]₂ where R - lower alkyl. Method involves trimethylsilylamination of corresponding trialkoxygermanium-derivative of hexamethyldisilazane at 90-130 C at 1.5-4-fold excess from stoichiometry of hexamethyldisilazane following by distillation isolation of product reaction under atmospheric pressure firstly, and then under vacuum. Total time of process is 1.5-2 h. Synthesized product is used in semiconductive engineering. EFFECT: improved method of synthesis. 3 cl, 3 tbl