A process for the preparation of a functional thin film.

摘要

PURPOSE:To enhance the orientability of a metal and to obtain the highly functional thin film having excellent magnetic characteristics or orientability and mass productivity by shielding the periphery of metallic vapor flow with a gaseous atmosphere and producing the thin film in the state of increasing an evaporation rate. CONSTITUTION:A high-polymer film 1 is set to a feed shaft 2 and is taken up by a take-up shaft 4 via a cooling can 3. A Co-Ni alloy 6 in a ceramics crucible 5 is melted by an electron gun from below and is vapor-deporited on the high-polymer film. The vapor flow unnecessary at the time of vapor deposition is cut by a shielding plate 7. The shielding plate 7 exists in the position where the incident angle of the vapor deposition can adopt the component of a zero degree from 90 deg.. A nozzle 8 for blowing gas exists above the shielding plate 7 and the gas is blown from this nozzle toward the metallic vapor flow and the film. The highly functional thin film which has the excellent magnetic characteristics and the crystal orientability and can be mass produced is obtd. in this way.