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A method of manufacturing a structure incorporating a cleaved optical guide to an optical fiber support for optical fiber-guide coupling and structure obtained.
A method of manufacturing a structure incorporating a cleaved optical guide to an optical fiber support for optical fiber-guide coupling and structure obtained.
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机译:一种制造结构的方法,该结构将分裂的光导结合到用于光导耦合的光导纤维支架上,并且获得了结构。
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摘要
The method comprises epitaxially guiding on a substrate (8), a barrier layer (18), a confinement layer (20), an active layer (22) and another confinement layer (24); etching these layers to form a pattern and a guide ribbon oriented in a first crystalline direction; forming a mask (34) resistant to a chemical attack of the substrate, having on both sides of the pattern, two openings (36, 38) communicating in a second direction parallel to a cleavage plane; subjecting the structure to said etching to etch the substrate and forming a beam oriented in the first direction and having a fixed end; subject the beam to a jet of pressurized fluid to cleave it at its fixed end.
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