首页> 外国专利> A method of manufacturing a structure incorporating a cleaved optical guide to an optical fiber support for optical fiber-guide coupling and structure obtained.

A method of manufacturing a structure incorporating a cleaved optical guide to an optical fiber support for optical fiber-guide coupling and structure obtained.

机译:一种制造结构的方法,该结构将分裂的光导结合到用于光导耦合的光导纤维支架上,并且获得了结构。

摘要

The method comprises epitaxially guiding on a substrate (8), a barrier layer (18), a confinement layer (20), an active layer (22) and another confinement layer (24); etching these layers to form a pattern and a guide ribbon oriented in a first crystalline direction; forming a mask (34) resistant to a chemical attack of the substrate, having on both sides of the pattern, two openings (36, 38) communicating in a second direction parallel to a cleavage plane; subjecting the structure to said etching to etch the substrate and forming a beam oriented in the first direction and having a fixed end; subject the beam to a jet of pressurized fluid to cleave it at its fixed end.
机译:该方法包括在衬底(8)上外延引导阻挡层(18),限制层(20),有源层(22)和另一个限制层(24);蚀刻这些层以形成图案和沿第一结晶方向取向的引导带;形成对衬底的化学腐蚀有抵抗力的掩模(34),该掩模在图案的两侧具有在平行于分裂平面的第二方向上连通的两个开口(36、38);使所述结构经受所述蚀刻以蚀刻所述基板并形成沿第一方向定向并具有固定端的光束;使光束受到加压流体的喷射,使其在其固定端裂开。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号