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Process for measuring surface topography using atomic force microscopy
Process for measuring surface topography using atomic force microscopy
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机译:使用原子力显微镜测量表面形貌的方法
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摘要
Accuracy and repeatability of atomic force microscopy (AFM) are improved by coating a single crystal silicon probe tip with a layer of carbon. The carbon-coated probe tip is brought into contact with a specimen surface, and is scanned across the area of interest. The carbon coating improves the interaction between the probe tip and specimen surface, particularly insulating surfaces, by reducing probe tip damage and minimizing charge build-up.
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