Local analysis of a specimen in an X-ray fluorescence spectrometer

摘要

An X-ray fluorescent spectrometer uses a screen which restricts a field of view to a local portion of a specimen irradiated by X-rays from an X-ray tube. Fluorescent X-rays from the specimen from the local portion and passing through the screen are collimated, dispersed and analyzed. A control unit controls a rotating mechanism to rotate the specimen or its container around a predetermined axis and also a moving mechanism to linearly move the screen such that the local portion to be analyzed and a throughhole of a proper size therefor can be brought adjacent each other. Data on the positions of local portions to be analyzed on the specimen can be inputted through an input unit. Effects of variations in detection results due to different distances between the analyzed local portions and the axis of rotation can be compensated for by storing reference data obtained from a standard sample in a data processing unit.