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Methods for anisotropic etching of (100) silicon
Methods for anisotropic etching of (100) silicon
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机译:各向异性蚀刻(100)硅的方法
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摘要
Extremely high aspect ratio vertical walls may be constructed using sodium hydroxide etches of (100) orientation silicon. Mask bodies 18a, 18b and 18c are used to form vertical wall sections 20a, 20b and 20c from a silicon substrate 10.
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