METHOD FOR LINEARIZING FLOW VELOCITY SENSOR AND LINEARIZED FLOW SPEED MEASURING INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for linearizing an improved flow velocity sensor and a linearized flow speed measuring instrument. ;SOLUTION: In a method and device for linearizing a flow velocity sensor based on pressure difference measurement, the difference between two pressure signals proportional to the square of a flow velocity is measured by a symmetrical capacitive pressure difference sensor 20 which is mechanically manufactured microscopically from a force balance principle. By applying an electronic pressure for recovering the force balance operated on a diaphragm 23 for detecting the pressure of the differential pressure sensor 20 within the sensor, a deflection due to the pressure balance is compensated, and the diaphragm 23 receives electrostatic force for recovering the force balance, thus obtaining the output signal of a system. A flow velocity sensor is linearized from the measurement of pressure difference where the amplitude of an electrical feedback control signal 29 for recovering force balance is directly proportional to the square root of the difference of two pressure signals or the linear function of the flow velocity.;COPYRIGHT: (C)1996,JPO