LEAKAGE DETECTOR AND DETECTING METHOD OF DIAPHRAGM TYPE VACUUM PUMP

摘要

PURPOSE: To provide a diaphragm system for a vacuum pump used in a gas sterilizer and to certainly detect damage to diaphragm of this pump and gas leakage attending on this damage. ;CONSTITUTION: A vacuum pump 13 to be installed in the point midway in an exhaust pipe 7 should be made into being formed as in a diaphragm system. In succession, a three-way valve 18 is installed at the more downstream side than this vacuum pump 13 of the exhaust pipe 7. A remaining port 21 of this three-way valve 18 connects an upstream end 17a of a return pipe 17. A downstream end 17b of this return pipe 17 is connected to the more upstream side than the vacuum pump 13 of the exhaust pipe 7. In addition, a pressure switch 22 is installed in this connecting part. A gas leakage attending on damage to the diaphragm is detected by this pressure switch 22.;COPYRIGHT: (C)1996,JPO