The emission optical transmitted window null which possesses the emission optical transmitted thin film which is produced by the production manner and its manner of the emission optical transmitted

摘要

PURPOSE:To prevent the generation of a clearance arising from the misregistration between a thin film consisting of beryllium and a frame part by growing the thin film on a substrate, then removing the substrate part exclusive of the peripheral frame part while this frame part is made to remain from the opposite side. CONSTITUTION:The thin film 1 consisting of the beryllium metal is grown on the smooth substrate 2 while the film is securely and uniformly stuck over the wide area thereof by a physical method, such as vacuum vapor deposition method or chemical method, such as plating method. The substrate 2 is removed by a method, such as etching, exclusive of the periphery thereof which is made to remain, after the growth, to form the integral structural body of the thin film 1 having the effect of emitted light transmission and atmosphere isolation and the remaining frame part 2a of the substrate 2 mounted with the thin film 1, by which the thin film 1 is formed in an immobile state. The generation of the clearance arising from the misregistration between the thin film 1 and the frame part 2a is prevented in this way. The frame part 2a of the integral structural body is fastened to a vacuum flange of a beam line by means of bolts, etc., via an O-ring 4, etc., by an ordinary method. The emitted light transmission window is thus completed.