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Installation manner null of the emission optical transmitted thin film in the emission optical transmitted window and the emission optical transmitted
Installation manner null of the emission optical transmitted thin film in the emission optical transmitted window and the emission optical transmitted
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机译:发射光透射窗中的发射光透射薄膜和发射光透射膜的安装方式为零
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摘要
PURPOSE:To enable an exposure treatment of a transfering device side under an atmospheric condition and also to enable grading up transmissivity of a radiation beam by forming a radiation beam transmitting thin film to be spherical, protruding to a side of a radiation beam source, and by lessening its thickness gradually towards its center. CONSTITUTION:A radiation beam transmitting thin film 1 is formed spherical protrudingly to a side of a radiation beam source. By this treatment, the thin film 1 is made to endure a tensile stress working to the thin film 1 derived from pressure difference between the radiation beam source side and the transfering device 4 side. By using the thin film 1 being shaped spherically in this way, tensile stress sigma shown in the figure, is solely works to the thin film 1. Accordingly, even if a film thickness t is small, the tensile stress sigma can be arbitrarily applied, by selecting a spherical curvature R corresponding to the film thickness t. Also, in order to make intensity of the radiation beam obtained at the device 4 side, to be of almost the same everywhere, the film thickness t is formed so as to get thinner towards a spherical center part C of the thin film 1, at its periphery, and therewith all transmitting distances of the radiation beams through the film are made to be quite same at every position.
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