SIMULATION METHOD, SIMULATION EQUIPMENT AND SEMICONDUCTOR MANUFACTURING EQUIPMENT USING THE SAME

摘要

PURPOSE: To provide a simple and precise simulation method and a simulation equipment which can calculate carrier mobility, and a semiconductor manufacturing equipment using the simulation method and the simulation equipment. CONSTITUTION: In a simulation method, as a mobility model of carrier, the carrier mobility due to Coulomb diffusion in ay universal model is calculated as a fixed value to the change of carrier density. A simulation equipment 1 is provided with an operation part 3 which performs the above calculation, an input part 2 in which data like impurity concentration distribution are inputted, and an output part 4 which outputs the results of simulation. A semiconductor manufacturing equipment is provided with the simulation equipment 1.