PURPOSE: To obtain a high speed high sensitivity infrared ellipsometry by combining Fourier transform infrared spectrophotometry with phase modulation spectroellipsometry. ;CONSTITUTION: A polarizer 3 and a phase modulation element 4 are arranged on the incident side of a sample 7 while an analyzer 5 and a light receiving unit 6 are arranged on the reflection side. A phase difference δ is introduced between Ppolarized light and S-polarized light from the polarizer 3 through modulation with frequency ω and the reflected light is detected through the analyzer 5. When two ellipsometric parameters at the time of reflection, i.e., the variation Δ of phase difference between the P-polarized and S-polarized lights and the amplitude reflectance ratio angle Ψ, are determined based on the DC component, and the components of frequencies ω, 2ω, an interferometer 2 for Fourier spectroscopy is arranged in the optical path between a light source 1 and time light receiving unit 6. The light receiving unit 6 detects the DC component and the components of frequency ω and 2ω from the light subjected to phase modulation and interference modulation. Δ and Ψ are determined based on the values obtained through Fourier transform of these three components.;COPYRIGHT: (C)1996,JPO
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