In the secondary ion mass spectrometry device the quantitative analysis

摘要

PURPOSE:To allow quantitative analysis by a thermodynamic analysis method even if there is no internal standard element in a sample by using the constituting element of the primary ion beam implanted to the sample as the internal standard element. CONSTITUTION:A liquid metal ion source 1 packed with an AuSi alloy 1 as a primary ion material is heated by electron bombardment and the sample is irradiated with the primary ion beam 3 drawn out thereof to generate secondary ions 5. The intensity per element of the secondary ions 5 is detected by a detector 7 via the mass spectrometer 6. The plasma temp. and electron density of the irradiated part are determined by calculation. The data groups are obtd. by changing the sample and making the similar measurement. The analysis of an unknown sample is executed by first drawing the mass spectra of the secondary ions, making the compsn. analysis and selecting out the approximate data from the data group from the kinds of the deduced sample, the primary ion species and the secondary ion intensity of the primary ion constituting elements, then calculating the concn. of the analysis element.