Optical type touch professional - bu

摘要

PURPOSE: To detect measuring planes extending along plural directions and to vary the working distance of objective lenses. ;CONSTITUTION: A beam splitter 60 for branching a beam of light into plural directions is provided and objective lenses 20Z, 20Y are provided in the plural directions so that detection of measuring planes 12Z, 12Y extending along the plural directions is made possible. Also, replacement of the objective lenses 20Z, 20Y is made possible so that the focal distances of the objective lenses can be varied.;COPYRIGHT: (C)1993,JPO&Japio