Professional - bu device and professional - bu manner

摘要

PURPOSE: To miniaturize a probe device adopting a mechanism, which makes projecting pins project by the rotation of a placement stage to lift up a wafer. ;CONSTITUTION: A probe device is provided with a rotating mechanism, which rotates a placement stage 2 to perform an alignment of probes 14 with a wafer 1, and moreover, a protrusion part 6, which rotates the stage 2 by 20° from a reference positional angle to make projecting pins 5 project, the stage 2 is rotated by ±7° in its circumferential direction to align the probes 14 with an electrode on the wafer, a probing inspection is made, the stage 2 is further rotated 20° in its circumferential direction, whereby the pins 5 are made to project from the surface of the stage 2 to make the wafer 1 separate from the surface of the stage 2 and the wafer 1 is transferred to a transfer arm.;COPYRIGHT: (C)1995,JPO