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THICK OR DISPLACEMENT MEASURING APPARATUS AND METHOD USING ELECTROSTATIC CAPACITANCE METER
THICK OR DISPLACEMENT MEASURING APPARATUS AND METHOD USING ELECTROSTATIC CAPACITANCE METER
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机译:厚或位移测量装置及使用静电电容计的方法
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摘要
PURPOSE: To measure the thickness and displacement of an insulating film with one electrostatic capacitance meter simply by adding a simple device. ;CONSTITUTION: A thickness or displacement measuring apparatus is made up of a flat type main electrode 1, a first flat plate-shaped guard electrode 2 for housing the main electrode 1 being insulated, a second flat tabular guard electrode 2' to house the first flat tabular guard electrode 2 being insulated, and a tabular earth electrode 8 placed on the top of the second flat tabular guard electrode 2 through an insulation member. In a method of measuring the thickness, the second flat tabular guard electrode 2' and the tabular earth electrode 8 are measured under the condition of insulation. In a method of measuring the displacement, the second flat tabular guard electrode 2 and the tabular earth electrode 8 are measured under the condition of a shortcircuiting.;COPYRIGHT: (C)1996,JPO
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