Thickness or displacement measuring apparatus using a capacitance meter, and thickness or displacement measuring method using a capacitance meter

摘要

PURPOSE: To measure the thickness and displacement of an insulating film with one electrostatic capacitance meter simply by adding a simple device. ;CONSTITUTION: A thickness or displacement measuring apparatus is made up of a flat type main electrode 1, a first flat plate-shaped guard electrode 2 for housing the main electrode 1 being insulated, a second flat tabular guard electrode 2' to house the first flat tabular guard electrode 2 being insulated, and a tabular earth electrode 8 placed on the top of the second flat tabular guard electrode 2 through an insulation member. In a method of measuring the thickness, the second flat tabular guard electrode 2' and the tabular earth electrode 8 are measured under the condition of insulation. In a method of measuring the displacement, the second flat tabular guard electrode 2 and the tabular earth electrode 8 are measured under the condition of a shortcircuiting.;COPYRIGHT: (C)1996,JPO