PROBE FOR CAPACITANCE TYPE DISPLACEMENT METER AND CAPACITANCE TYPE DISPLACEMENT METER USING SAME

摘要

PROBLEM TO BE SOLVED: To fix an object under measurement from above in performing measurement by using a probe for a capacitance type displacement meter and also to use other instruments.;SOLUTION: This probe for a capacitance type displacement meter is equipped with an annular measurement electrode 12, an inside protection electrode 11 provided inside the measurement electrode 12, and an outside protection electrode 13 provided outside the measurement electrode 12, and further is equipped with a through hole 15 provided inside the protection electrode 11. In measuring displacement with the measurement electrode 12 disposed above the object under measurement, the object can be fixed from above with a tool made of metal inserted through a through hole 15.;COPYRIGHT: (C)2007,JPO&INPIT