OXIDATION OF SURFACE OF BODY TO BE TREATED OR MATERIAL ON THE SAME SURFACE UNDER REDUCED PRESSURE

摘要

PURPOSE: To further increase cleaning speed and to enable uniform treatment even to a rugged surface by carrying out cleaning under reduced pressure in UV/O₃ cleaning with a dielectric barriered discharge lamp contg. gaseous xenon. ;CONSTITUTION: Oxygen or oxygen-contg. fluid is irradiated under reduced pressure with vacuum UV radiated from a dielectric barriered discharge lamp contg. gaseous xenon or xenon-based gas to form ozone and active oxidizing decomposed matter by a photochemical reaction. These products are brought into contact with the surface of a body to be treated or a material on its surface. Cleaning speed is increased under reduced pressure as compared with the conventional speed and high concn. ozone or active oxidizing matter is obtd. without using an ozonizer. High treatment speed is attained, the interval between the light source and the body to be treated can be widened and even the rugged surface of a body to be treated can be uniformly treated.;COPYRIGHT: (C)1996,JPO