SUCTION PAD PROVIDED WITH STATIC ELECTRICITY PREVENTING FUNCTION, METHOD FOR RELEASING SUBJECT CHUCKED BY THE SUCTION PAD AND SEMICONDUCTOR MANUFACTURING DEVICE USING THE SUCTION PAD

摘要

PURPOSE: To provide a suction pad with a static electricity preventing function, which allows suppression of static electricity generation when a semiconductor product is held by the suction pad and released therefrom in the transfer device of a semiconductor manufacturing device, and provide a semiconductor manufacturing device using the pad. ;CONSTITUTION: A suction pad is provided for an auto-handler, etc., so as to hold a semiconductor product in depressurized condition. The suction pad is composed of a suction pad main body 1 which holds the semiconductor product, a suction control valve 2, a release control valve 3 and a hold/release control valve 4. The suction pad main body 1 is permitted to have a small electric resistance by aluminum material and is electircally grounded to the ground 5. A release gas control chamber 9 formed on the outer periphery of the suction chamber 7 is provided with an O-ring 11, which is formed of rubber material containing carbon and has a larger electric resistance compares with the suction pad main body 1 with less contact area, allowing protrusion or recession from the suction surface 6 of the suction pad main body 1 by controlling air pressure.;COPYRIGHT: (C)1996,JPO