INSTRUMENT FOR MEASURING FINE PROBE SHAPE AND METHOD FOR MEASURING FINE PROBE SHAPE

摘要

PURPOSE: To make it possible to measure the shape of the tip of a probe accurately in a short time by using one surface of a single crystal as a principal surface, and providing a step, where the crystal surface is close to a vertical state, at the principal surface. ;CONSTITUTION: The upper surface of an Si (011) substrate 11 is made to be a principal surface 12. The Si (111) surface, which is perpendicular to the principal surface 12, is made to be a side wall 13. Thus, a step 14, whose height is about 100nm, is provided. The step 14 is scanned with a fine probe and an interatomic-force microscope in the direction perpendicular to the intersection line of the principal surface 12 and the side wall 13, and the shape of the step 14 is measured. Then, the flat part corresponding to the principal surface 12 in the shape for measurement is removed. The remaining part, that is, the shape obtained by rotating a line a (A-B) by 180 degrees, is obtained. Thus, the shape of the tip of the fine probe, that is, the shape of one side of a part, which is obtained by cutting the fine probe with a plane including the scanning direction at a right angle with the principal surface, can be obtained. The shape of the fine probe can be accurately grasped by this method and can be measured in a short time.;COPYRIGHT: (C)1996,JPO