Hydrogenated amorphous silicon linear position-sensitive detector (LTFPSD).

摘要

This invention relates to an optoelectronic device, called a linear position-sensitive detector (LTFPSD), to be used in 3-D inspection systems (including two- dimensional systems), such as surfaces, defects, determining profiles, etc. This device consists of n (in which n can vary, for example, from 16 to 4096) one-dimensional position detectors integrated and arranged in parallel or in the form of a matrix, with two or four electrical contacts at the ends, for extracting the analog signal, which is then processed via external read circuits. Each element of the device supplies information continuously, on the position of a point of the line of light projected onto the surface (or medium to be inspected), with a direct linear relationship existing between the position of the line of light (or beam) and the signals (voltage or current) collected by each sensor element. Using this invention it is possible to carry out a survey of any surface (e.g. by using laser triangulation or interferometry) quickly and directly, without limitations on the digitized information and in a more compact form. The dimensioning of the device is a function of the application and may vary from 100m x 100m to 20cm x 20cm. IMAGE