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USEABLE SHAPER FOR EFG CRYSTAL GROWING.

机译:EFG晶体生长可用的形状。

摘要

A novel capillary die and crystal growing method are provided for growing a hollow crystalline body by EFG. Inner and outer annular moats surround the die tip. Passageways are provided for supplying melt to those moats from a crucible, so that melt in said moats will wet and cover the inner and outer exterior surfaces of the die tip during growth of a hollow crystalline body. The novel die may be constructed so as to have a lower die tip and a shorter capillary than EFG dies heretofore used to successfully grow hollow bodies. The die design facilitates keeping the temperature of the die tip substantially uniform about its circumference, thereby improving the uniformity of thickness of the wall of the crystalline body grown from a film of melt on the die tip. The moats reduce the likelihood of the growth process being interrupted or adversely affected by flooding of the die. In the event the growth meniscus breaks, liquid silicon is captured in the moats, thereby preventing or reducing the likelihood of flooding of the die and associated growth apparatus.
机译:提供了一种新颖的毛细管模具和晶体生长方法,用于通过EFG生长空心晶体。内和外环形沟围绕模头。提供通道以从坩埚向那些护城河供应熔体,使得所述护城河中的熔体将在中空晶体生长期间润湿并覆盖模头尖端的内部和外部外表面。可以构造新颖的模具,以具有比迄今为止用来成功地生长中空体的EFG模具更低的模具尖端和更短的毛细管。模具设计有利于使模具尖端的温度在其周围保持基本均匀,从而提高了由模具尖端上的熔体膜生长的结晶体壁的厚度的均匀性。护城河减少了生长过程被模具淹没而中断或不利影响的可能性。万一生长弯液面破裂,液态硅被捕获在the沟中,从而防止或减少管芯和相关生长装置溢流的可能性。

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