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CVD diamond or diamond-like carbon for chemical-mechanical polish etch stop
CVD diamond or diamond-like carbon for chemical-mechanical polish etch stop
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机译:CVD金刚石或类金刚石碳,用于化学机械抛光蚀刻停止
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摘要
Metallized semiconductor chips, such as are intended for VLSI, are coated with a first layer of SiO2 followed by a second layer of CVD diamond or DLC as an etch stop. The resulting structure is reproducibly and controllably planarized using a chem-mech slurry and an appropriate polishing pad, enabling subsequent layers to be built up similarly.
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